A User's Guide to Ellipsometry by Harland G. Tompkins (English) Paperback Book
20,88 €
Three appendices provide helpful references. by Harland G. Tompkins, Nicholas Poussin. Theoretical Aspects 2. The Special Case of Polysilicon 7. The Effect of Roughness Case Studies Case 1. Ion Beam Interaction with Silicon Case 3.
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