Laser Heat-Mode Lithography: Principle and Methods by Jingsong Wei (English) Har
140,72 €
By Jingsong Wei. Jingsong Wei received the Ph.D. degree in Chinese Academy of Sciences. Author Jingsong Wei. It introduces laser heat-mode lithography, where the resist thin films are essentially an opto-thermal response to the laser beam with changeable wavelength and are not sensitive to laser wavelength.
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