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MEMS und Nanotechnologie für Gassensoren, Hardcover von Roy, Sunipa; Sarkar, Ch...

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MEMS and Nanotechnology for Gas Sensors, Hardcover by Roy, Sunipa; Sarkar, Chandan Kumar, ISBN 1498700128, ISBN-13 9781498700122, Like New Used, Free shipping in the US Roy and Sarkar describe how using microelectromechanical systems (MEMS) for gas sensing and biosensing can reduce the power consumption of the sensors and can analyze small volumes of the gas. Looking in turn at fabrication procedure and applications, they consider such topics as a substrate for MEMS, pattern transfer with photolithography, microheaters for gas sensors, sensing with graphene, nanocrystalline zinc-oxide-based microfabricated chemical sensor, and nanostructures for volatile organic compound detection. Annotation ©2016 Ringgold, Inc., Portland, OR ()

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