Physical and Technical Problems of SOI Structures and Devices by J.-P. Colinge (
74,05 €
Colinge, Vladimir S. Lysenko, Alexei N. Nazarov. Soi Materials. - Low Dose SIMOX for ULSI Applications. - Why Porous Silicon for SOI?. - Ion Beam Processing for Silicon-on-Insulator. - Semi-Insulating Oxygen-Doped Silicon by Low Temperature Chemical Vapor Deposition for SOI Applications.
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